Angular velocity detection device and angular velocity sensor including the same

ABSTRACT

An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/705,459 filed on Dec. 5, 2012, which is a by-pass continuation ofPCT/JP2011/003558 filed on Jun. 22, 2011, which claims priority toJapanese Patent Application Nos. 2010-144642 and 2010-144643 filed onJun. 25, 2010; 2010-248078 and 2010-248079 filed on Nov. 5, 2010; and2011-025738 filed on Feb. 9, 2011.

BACKGROUND

1. Technical Field

The technical field relates to an angular velocity sensor for use in,for example, a mobile device or a vehicle, and to an angular velocitydetection device included in the sensor.

2. Background Art

FIG. 17 is a perspective view of an angular velocity detection deviceused in a conventional angular velocity sensor. Angular velocitydetection device 1 includes frame body 2, transverse beam 3, arms 4, 5,6, and 7, weights 8, 9, 10, and 11, driver 12, monitor 13, and detectors14, 15. Transverse beam 3 is suspended by frame body 2 in the directionof the X axis where the X, Y, and Z axes are orthogonal to each other.One end of each of arms 4 and 5 is supported by transverse beam 3 andarms 4 and 5 extend in the positive direction of the Y axis. Weights 8and 9 are disposed at another end of each of arms 4 and 5, respectively.One end of each of arms 6 and 7 is supported by transverse beam 3 andarms 6 and 7 extend in the negative direction of the Y axis. Weights 10and 11 are disposed at another end of each of arms 6 and 7,respectively. Driver 12 applies an AC voltage to arm 4 so as to generatea piezoelectric effect, thereby vibrating arm 4 in the direction of theX axis. This vibration causes arms 5, 6, and 7 to resonate in thedirection of the X axis. Monitor 13 detects the displacements of arms 4,5, 6, and 7 in the direction of the X axis. Detectors 14 and 15 outputsensing signals, which are generated on arms 6 and 7 due to thepiezoelectric effect and are caused by the Coriolis force when anangular velocity is applied to angular velocity detection device 1. Fromthese sensing signals, displacements in the direction of the Y or Z axisare detected.

SUMMARY

The angular velocity detection device includes an outer frame includinga fixed portion and an outer beam portion connected to the fixedportion; a sensing part surrounded by the outer frame with a first slittherebetween; and a joint connecting the outer frame to the sensingpart. The sensing part includes an inner beam portion, a flexibleportion, and a detector. The inner beam portion has a hollow regioninside and is square-shaped when viewed from above. The flexible portionis disposed in the hollow region of the inner beam portion, andconnected to the inner edge of the inner beam portion. The detector isdisposed in the flexible portion. The first slit is formed to surroundthe sensing part excluding the joint.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1A is a top view of an angular velocity detection device accordingto an embodiment.

FIG. 1B is a sectional view of the angular velocity detection deviceshown in FIG. 1A.

FIG. 2 is a sectional view of an essential part of the angular velocitydetection device shown in FIG. 1A.

FIG. 3 shows the relationship between the phases of drive signals andthe phases of vibrations of the arms of the angular velocity detectiondevice shown in FIG. 1A.

FIG. 4 shows the relation of connection between the angular velocitydetection device shown in FIG. 1A and a driving circuit.

FIG. 5 is a top view showing a behavior of the angular velocitydetection device shown in FIG. 1A when an angular velocity around the Zaxis is applied thereto.

FIG. 6 is a top view showing a behavior of the angular velocitydetection device shown in FIG. 1A when an angular velocity around the Yaxis is applied thereto.

FIG. 7 shows phases of signals to be output from detectors of theangular velocity detection device shown in FIG. 1A.

FIG. 8 shows the relation of connection between the angular velocitydetection device shown in FIG. 1A and a detecting circuit.

FIG. 9 is a top view of an angular velocity detection device accordingto another embodiment.

FIG. 10 is a top view of an angular velocity detection device accordingto another embodiment.

FIG. 11 shows phases of signals to be output from detectors of theangular velocity detection device shown in FIG. 10.

FIG. 12 is a top view of an angular velocity detection device of anotherembodiment.

FIG. 13 shows phases of signals to be output from detectors of theangular velocity detection device shown in FIG. 12.

FIG. 14 is a partial top view of an angular velocity detection device ofanother embodiment.

FIG. 15 is a top view of an angular velocity detection device of anotherembodiment.

FIG. 16A is a top view of an angular velocity detection device ofanother embodiment.

FIG. 16B is a top view of an angular velocity detection device ofanother embodiment.

FIG. 17 is a perspective view of a conventional angular velocitydetection device.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Before the detailed discussion of exemplary embodiments, problems of theconventional angular velocity detection device will be described. Inangular velocity detection device 1 shown in FIG. 17, detectors 14 and15 are not disposed symmetrically with respect to both axes “A” and “B”,which are parallel to the Y and X axes, respectively. This makes itimpossible to cancel unwanted signals due to external disturbance suchas acceleration or impact, causing the detection accuracy of the angularvelocity to be low. Moreover, an external stress applied to angularvelocity detection device 1 acts on transverse beam 3 so as to causeunwanted vibration on arms 4, 5, 6, and 7, thereby fluctuating outputsof detectors 14 and 15.

Referring now to the drawings, description will be provided of exemplaryembodiments of an angular velocity detection device and an angularvelocity sensor including the device. In these embodiments, the samecomponents as in the preceding embodiments are denoted by the samereference numerals, and the detailed description thereof may be omitted.

Exemplary Embodiments

FIG. 1A is a top view of angular velocity detection device 16(hereinafter referred as device 16) according to an embodiment. FIG. 1Bis a sectional view of device 16, taken along line 1B-1B of FIG. 1A.Device 16 includes an outer frame including fixed portions 17A and 17B,and outer beam portions 18A and 18B connected to fixed portions 17A and17B. Device 16 further includes a sensing part surrounded by the outerframe with first slits 80A and 80B therebetween, and joints 19A and 19Bconnecting the outer frame and the sensing part. First slits 80A and 80Bare formed to surround the sensing part excluding joints 19A and 19B.

The sensing part includes inner beam portion 20A, central beam portion20B, first arm 21, second arm 22, third arm 23, fourth arm 24(hereinafter, arms 21 to 24), drivers 29 to 36, and detectors 41 to 48.The sensing part further includes weights 25 to 28 disposed at an end ofeach of first to fourth arms 21, 22, 23, and 24, respectively.

Inner beam portion 20A is square-shaped when viewed from above. Centralbeam portion 20B connects the opposite sides of inner beam portion 20A,and is parallel to outer beam portion 18A. Arms 21 to 24 are disposedinside inner beam portion 20A and connected to central beam portion 20B.

Thus, fixed portions 17A, 17B, outer beam portions 18A, 18B, and innerbeam portion 20A together form a frame part having a top surface (firstsurface) and a bottom surface (second surface), and also having inneredge 104 and hollow region 102 inside the frame part. As shown in FIG.1B, lower support body 110B is disposed so as to confront the bottomsurface of the frame part. Lower support body 110B is bonded to fixedportions 17A and 17B via adhesive portions 108. Central beam portion20B, arms 21 to 24, and weights 25 to 28 are disposed in hollow region102 of the frame part, thereby forming a flexible portion connected toinner edge 104 of the frame part. First slits 80A and 80B surroundinginner beam portion 20A are through-holes disposed between adhesiveportions 108 of the frame part and the flexible portion.

Adhesive portions 108 are formed at the four corners of the outer framein FIG. 1A, but may alternatively extend long between outer beamportions 18A, 18B along fixed portions 17A, 17B, or extend along outerbeam portions 18A, 18B.

As shown in FIG. 1B, the frame part and lower support body 110B areseparated by the thickness of adhesive portions 108. This configurationcan reduce the stress when the frame part and lower support body 110Bare bonded to each other, thereby reducing the residual stressaccumulated in the flexible portion. As a result, the sensitivity ofdevice 16 is prevented from degrading over time.

Arm 22 is disposed on the same side as arm 21 with respect to centralbeam portion 20B, and is line-symmetrical to arm 21. More specifically,arm 22 is symmetrical to arm 21 with respect to axis “C”, which is atright angles to central beam portion 20B. Axis “C” is parallel to the Yaxis.

Arm 23 is disposed on the opposite side of arm 21 with respect tocentral beam portion 20B, and is line-symmetrical to arm 21. Morespecifically, arm 23 is symmetrical to arm 21 with respect to axis “D”,which passes through the center of central beam portion 20B. Axis “D” isparallel to the X axis.

Arm 24 is disposed on the same side as arm 23 with respect to centralbeam portion 20B, and is line-symmetrical to arm 23. More specifically,arm 24 is symmetrical to arm 23 with respect to axis “C”. Thus, arms 21and 22 extend in the positive direction of the Y axis, whereas arms 23and 24 extend in the negative direction of the Y axis.

Drivers 29, 30 and detectors 41, 42 are disposed on arm 21. Drivers 31,32 and detectors 43, 44 are disposed on arm 22. Drivers 33, 34 anddetectors 45, 46 are disposed on arm 23. Drivers 35, 36 and detectors47, 48 are disposed on arm 24. Drivers 29 to 36 drive arms 21 to 24 inthe X axis direction. Detectors 41 to 48 detect the displacements ofweights 25 to 28 disposed on arms 21 to 24, respectively, in the Y or Zaxis direction.

Device 16 further includes monitors 37 to 40 in the vicinity of theregions where arms 21 to 24 are connected to central beam portion 20B.Monitors 37 to 40 detect the displacements of arms 21 to 24 in the Xaxis direction.

Each component of angular velocity detection device 16 is now describedas follows. Fixed portions 17A and 17B support outer beam portions 18Aand 18B. Specifically, fixed portions 17A and 17B are formed parallel tothe Y axis, and both ends of them are connected to outer beam portions18A and 18B, thereby forming an outside frame body. Fixed portions 17Aand 17B are fixed, using a support member or an adhesive, in a package(not shown) where device 16 is stored. Fixed portions 17A and 17Bincludes electrode pads (not shown) at their outer edges. Theseelectrode pads are electrically connected to drivers 29 to 36, monitors37 to 40, and detectors 41 to 48 by wires (not shown).

Inner beam portion 20A has two sides parallel to the Y axis and twosides parallel to the X axis, thereby forming an inside frame body.Those two sides of inner beam portion 20A that are parallel to the Yaxis can bend in the Z axis direction, and are substantially symmetricalto each other with respect to axis “C” parallel to the Y axis. As aresult, the two sides of inner beam portion 20A that are parallel to theY axis bend with a substantially equal amplitude in response to anangular velocity applied to device 16. The two sides of inner beamportion 20A that are parallel to the X axis are connected at theirsubstantial centers to outer beam portions 18A and 18B via joints 19Aand 19B.

Central beam portion 20B is parallel to the X axis, and is connected tosubstantial midpoints of the two sides of inner beam portion 20A thatare parallel to the Y axis. As a result, central beam portion 20B canbend in the Z axis direction.

Arm 21 extends in the positive direction of the Y axis from one endthereof connected to central beam portion 20B; extends in the positivedirection of the X axis from the first joint; and extends in thenegative direction of the Y axis from the second joint, thus forming theshape of the letter “J”. At the other end of arm 21, weight 25 isdisposed.

Arm 22 extends in the positive direction of the Y axis from one endthereof connected to central beam portion 20B; extends in the negativedirection of the X axis from the first joint; and extends in thenegative direction of the Y axis from the second joint, thus forming theshape of the letter “J”. At the other end of arm 22, weight 26 isdisposed.

Arm 23 extends in the negative direction of the Y axis from one endthereof connected to central beam portion 20B; extends in the positivedirection of the X axis from the first joint; and extends in thepositive direction of the Y axis from the second joint, thus forming theshape of the letter “J”. At the other end of arm 23, weight 27 isdisposed.

Arm 24 extends in the negative direction of the Y axis from one endthereof connected to central beam portion 20B; extends in the negativedirection of the X axis from the first joint; and extends in thepositive direction of the Y axis from the second joint, thus forming theshape of the letter “J”. At the other end of arm 24, weight 28 isdisposed. Arms 21 to 24 are connected to weights 25 to 28, respectively,at the recessed center of one side of each of weights 25 to 28 having asubstantially square shape. Arms 21 to 24 can bend in the X, Y, and Zaxes directions.

Arms 21 and 22 are symmetrical with respect to axis “C” parallel to theY axis. Arms 23 and 24 are also symmetrical with respect to axis “C”.Arms 21 and 23 are symmetrical with respect to axis “D” parallel to theX axis. Arms 22 and 24 are also symmetrical with respect to axis “D”.Disposed to be symmetrical with respect to axes “C” and “D”, arms 21 to24 bend with a substantially equal amplitude in response to an angularvelocity applied to device 16.

Fixed portions 17A, 17B, outer beam portions 18A, 18B, inner beamportion 20A, central beam portion 20B, and arms 21 to 24 are made of apiezoelectric material such as crystal, LiTaO₃, and LiNBO₃. Theseportions can alternatively be made of a non-piezoelectric material suchas silicon, diamond, fused silica, alumina, and GaAs. Using siliconenables these portions to be miniaturized by micro processing technologyand be integrated into an IC or other circuit.

Fixed portions 17A, 17B, outer beam portions 18A, 18B, inner beamportion 20A, central beam portion 20B, and arms 21 to 24 may be made ofthe same or different materials from each other and then assembled, ormay be integrally formed from the same material. In the case of formingintegrally from the same material, dry or wet etching can be used toform fixed portions 17A, 17B, outer beam portions 18A, 18B, inner beamportion 20A, central beam portion 20B, and arms 21 to 24 efficiently inthe same process.

Drivers 29 to 36 drive arms 21 to 24 in the X axis direction. Drivers 29to 36 are of piezoelectric type using piezoelectric elements in theembodiment, but may alternatively be of capacitance type using thecapacitance between electrodes.

FIG. 2 is a schematic sectional view of drivers 29 and 30, taken alongline 2 of FIG. 1A. Driver 29 includes lower electrode 29A, upperelectrode 29C, and piezoelectric element 29B sandwiched between theseelectrodes. Driver 30 includes lower electrode 30A, upper electrode 30C,and piezoelectric element 30B sandwiched between these electrodes.Drivers 29 and 30 are disposed parallel to each other on the top surfaceof arm 21.

Lower electrodes 29A, 30A and upper electrodes 29C, 30C are made ofplatinum (Pt), gold (Au), aluminum (Al), or an alloy or oxide containingone of them as a main component. Lower electrodes 29A and 30A arepreferably made of Pt. In the case of using Pt, lead zirconate titanate(PZT), which is contained in piezoelectric elements 29B and 30B, can beoriented in one direction. Upper electrodes 29C and 30C are preferablymade of Au. In the case of using Au, the resistance hardly degrades overtime, allowing device 16 to be highly reliable.

Lower electrodes 29A and 30A are reference potential electrodes.Applying an AC driving voltage to upper electrodes 29C and 30C canvibrate arm 21 in the X axis direction. An AC driving voltage can beapplied to both lower electrodes 29A, 30A and upper electrodes 29C, 30Cto make the drive efficiency higher.

Drivers 31 to 36, which have the same structure as drivers 29 and 30,are disposed on the top surfaces of arms 22 to 24, respectively. Asshown in FIG. 1A, drivers 29 to 36 are preferably disposed near weights25 to 28 in arms 21 to 24 having a substantially J shape. With thisarrangement, those regions of arms 21 to 24 near central beam portion20B can be used for detectors 41 to 48. On the other hand, in the casewhere drivers 29 to 36 are disposed in those regions of arms 21 to 24near central beam portion 20B, drivers 29 to 36 can have a high driveefficiency and a large area. This results in an increase in theamplitude of arms 21 to 24, allowing device 16 to have a highsensitivity.

FIG. 3 shows the relationship between the phases of the drive signalsgiven to drivers 29 to 36 and the phases of vibrations of arms 21 to 24.Drivers 29, 31, 33, and 35 are given drive signals of the same phase(+), whereas drivers 30, 32, 34, and 36 are given drive signals of theopposite phase (−) to it. As a result, arms 21, 23 vibrate at the samephase (+), whereas arms 22, 24 vibrate at the opposite phase (−) to itin the X axis direction.

Monitors 37 to 40 detect the displacements of arms 21 to 24 in the Xaxis direction. Monitors 37 to 40 are of piezoelectric type usingpiezoelectric elements in the embodiment like drivers 29 and 30 shown inFIG. 2, but may alternatively be of capacitance type using thecapacitance between electrodes.

Monitors 37 to 40 are disposed on the top surfaces of arms 21 to 24.More specifically, monitors 37 to 40 are disposed in those regions ofthe top surfaces of arms 21 to 24 where they can receive monitor signalsof the same phase as the vibrations of arms 21 to 24 shown in FIG. 3.Monitors 37 to 40 can efficiently detect distortion in spite of theirsmall area by being disposed in the regions of arms 21 to 24 having asubstantially J shape near central beam portion 20B as shown in FIG. 1A.Monitors 37 to 40 are preferably smaller in area than detectors 41 to 48in order to secure the area for detectors 41 to 48.

Detectors 41 to 48 detect the displacements of arms 21 to 24 in the Y orZ axis direction. Detectors 41 to 48 are of piezoelectric type usingpiezoelectric elements like drivers 29 and 30 shown in FIG. 2, but mayalternatively be of capacitance type using the capacitance betweenelectrodes.

Detectors 41 to 48 are disposed on the top surfaces of arms 21 to 24. Asshown in FIG. 1A, detectors 41 to 48 can be disposed in those regions ofarms 21 to 24 having a substantially J shape near central beam portion20B. With this arrangement, detectors 41 to 48 can have a high detectionefficiency, and a large area, allowing device 16 to have a highsensitivity. On the other hand, in the case where detectors 41 to 48 aredisposed in those regions of arms 21 to 24 near weights 25 to 28, thoseregions of arms 21 to 24 near central beam portion 20B can be used fordrivers 29 to 36.

Detectors 41, 42 and detectors 43, 44 are symmetrical with respect toaxis “C” parallel to the Y axis, whereas detectors 45, 46 and detectors47, 48 are symmetrical with respect to axis “C”. Detectors 41, 42 anddetectors 45, 46 are symmetrical with respect to axis “D” parallel tothe X axis, whereas detectors 43, 44 and detectors 47, 48 aresymmetrical with respect to axis “D”. The arrangement of detectors 41 to48 symmetrically with respect to axes “C” and “D” can cancel unwantedsignals due to external disturbance such as acceleration and impact,allowing accurate detection of an angular velocity.

First slits 80A and 80B are formed in such a manner as to surround thesensing part excluding joints 19A and 19B. In short, the sensing part issuspended by joints 19A and 19B. For this reason, when fixed portions17A, 17B and/or outer beam portions 18A, 18B are subjected to a stress,causing device 16 to be pulled in the X axis direction, or causing fixedportions 17A, 17B and/or outer beam portions 18A, 18B to be bent, thestress is not easily transferred to the sensing part. This reduces theeffect of the external stress on the sensing part, thereby reducingfluctuations in the output of detectors 41 to 48 when an external stressis applied to device 16. Specifically, in the case where device 16 has asize of about 2.5×2.5 mm and its base is made of 150 μm thick silicon(Si), the influence of the stress on the sensing part is reduced toabout one third. This effect is provided independently of the effect ofthe arrangement of detectors 41 to 48.

The following is a description of a driving circuit and a detectingcircuit which are connected to device 16. Specifically, the followingdescription is focused on the improvement in the detection accuracy ofan angular velocity achieved by the arrangement of detectors 41 to 48symmetrically with respect to axes “C” and “D”.

FIG. 4 shows the relation of connection between angular velocitydetection device 16 and driving circuit 50, which includes I-Vconversion amplifier 51, AGC (Auto Gain Control) 52, filter 53, anddrive amplifiers 54, 55. Electrode pads 49A to 49H, which are part ofelectrode pads formed in fixed portions 17A and 17B, are electricallyconnected to drivers 29 to 36, respectively, and electrode pads 49J to49M are electrically connected to monitors 37 to 40, respectively.

Electrode pads 49J to 49M output monitor signals. The monitor signalsare connected together, converted into a voltage by I-V conversionamplifier 51, adjusted to have a constant amplitude by AGC 52, separatedfrom unwanted frequency components by filter 53, inverted and amplifiedby drive amplifier 54, and supplied to electrode pads 49B, 49D, 49F, and49H. Drive amplifier 54 outputs a drive signal. The drive signal isinverted and amplified by drive amplifier 55, and supplied to electrodepads 49A, 49C, 49E, and 49G. With this configuration, driving circuit 50can provide the drive signals having the phases shown in FIG. 3 todrivers 29 to 36, thereby vibrating arms 21 to 24 in the phases shown inFIG. 3.

FIGS. 5 and 6 are top views showing behaviors of angular velocitydetection device 16 when an angular velocity is applied thereto. FIG. 5shows the case of detecting an angular velocity around the Z axis. Whendriving circuit 50 provides drive signals to drivers 29 to 36 in device16, drive oscillation 56 is generated at a unique drive oscillationfrequency in the X axis direction. When angular velocity 57 around the Zaxis is applied to device 16, Coriolis force is generated on weights 25to 28 in the Y axis direction, thereby generating detection oscillation58. Detection oscillation 58 generated in weights 25 to 28 in the Y axisdirection allows arms 21 to 24 to vibrate in the X axis direction. Arms21 and 23 perform drive oscillation in anti-phase with arms 22 and 24,therefore detection oscillation of arms 21 and 23 is in anti-phase withthat of arms 22 and 24.

Detection oscillation 58 allows detectors 41 to 48 to output detectionsignals that have the same frequency as drive oscillation 56 and thatalso have an amplitude dependent on angular velocity 57. Thus, measuringthe magnitude of the detection signals results in detecting themagnitude ω_(z) of angular velocity 57.

FIG. 6 shows the case of detecting an angular velocity around the Yaxis. In response to angular velocity 59 around the Y axis, Coriolisforce generates detection oscillation 60 on weights 25 to 28 in the Zaxis direction. Arms 21 and 23 perform drive oscillation in anti-phasewith arms 22 and 24, therefore detection oscillation of arms 21 and 23is in anti-phase with that of arms 22 and 24.

Detection oscillation 60 allows detectors 41 to 48 to output detectionsignals that have the same frequency as drive oscillation 56 and thatalso have an amplitude dependent on angular velocity 59. Thus, measuringthe magnitude of the detection signals results in detecting themagnitude ω_(y) of angular velocity 59.

FIG. 7 shows phases of signals to be output from detectors 41 to 48 ofangular velocity detection device 16. The signals to be output fromdetectors 41 to 48 are referred to as S1 to S8, respectively. FIG. 7specifically shows the following: the phases of the drive signals of thedetectors; the phases in the case where angular velocities are appliedaround the X, Y, and Z axes; and the phases in the case whereaccelerations are applied in the X, Y, and Z axes directions, withrespect to the phases of the drive signals provided by driving circuit50.

From FIG. 7, the magnitude ω_(z) of angular velocity 57 around the Zaxis can be calculated by Mathematical Formula (1)

ω_(z)={(S2+S5)+(S3+S8)}−{(S1+S6)+(S4+S7)}  (1)

The magnitude ω_(y) of angular velocity 59 around the Y axis can becalculated by Mathematical Formula (2)

ω_(y)={(S2+S5)+(S1+S6)}−{(S3+S8)+(S4+S7)}  (2)

The calculation of Mathematical Formulas (1) and (2) can be performed bydetecting circuit 61 shown in FIG. 8. FIG. 8 shows the relation ofconnection between angular velocity detection device 16 and thedetecting circuit. Detecting circuit 61 processes signals S1 to S8output from detectors 41 to 48 of device 16.

When the phases of the drive signals are substituted into MathematicalFormula (1), the result becomes 0. Specifically, detectors 41 to 48receive drive signals as unwanted signals, which in turn are cancelledwith each other by the calculation of Mathematical Formula (1).Similarly, when the phases in the cases that each one of the angularvelocities around the X and Y axes, and the accelerations in the X, Y,and Z axes directions is applied are substituted into MathematicalFormula (1), the results become 0. Thus, angular velocities around theother axes and accelerations in the directions of the other axes, whichare unwanted signals, are cancelled with each other by the calculationof Mathematical Formula (1).

When the phases in the cases that each one of the drive signals, angularvelocities around the X and Z axes, and accelerations in the X, Y, and Zaxes directions is applied are substituted into Mathematical Formula(2), the results become 0. Thus, drive signals, angular velocitycomponents around the other axes and acceleration components in thedirections of the other axes, which are unwanted signals, are cancelledwith each other by the calculation of Mathematical Formula (2).

As described above, detectors 41 to 48 are disposed symmetrically withrespect to axis “C” parallel to the Y axis, and also with respect toaxis “D” parallel to the X axis. This arrangement can cancel the drivesignals, angular velocities around the other axes, and accelerations inthe directions of the other axes, which are unwanted signals.

FIG. 8 shows the relation of connection between angular velocitydetection device 16 and detecting circuit 61. Fixed portions 17A and 17Binclude electrode pads 491 to 498 electrically connected to detectors 41to 48.

The output lines of electrode pads 492 and 495 are connected togetherand connected to I-V conversion amplifier 62A. In short, signals S2 andS5 are superimposed and sent to I-V conversion amplifier 62A. The outputlines of electrode pads 493 and 498 are connected together and connectedto I-V conversion amplifier 62B. In short, signals S3 and S8 aresuperimposed and sent to I-V conversion amplifier 62B. The output linesof electrode pads 491 and 496 are connected together and connected toI-V conversion amplifier 62C. In short, signals S1 and S6 aresuperimposed and sent to I-V conversion amplifier 62C. The output linesof electrode pads 494 and 497 are connected together and connected toI-V conversion amplifier 62D. In short, signals S4 and S7 aresuperimposed and sent to I-V conversion amplifier 62D.

The angular velocity around the Z axis is calculated as follows. Theoutput lines of I-V conversion amplifiers 62A and 62B are connectedtogether, whereas the output lines of I-V conversion amplifiers 62C and62D are connected together. These signals connected together are eachsent to difference amplifier 63Z. Difference amplifier 63Z outputs asignal, which is in turn detected by detector circuit 64Z using thesignal from driving circuit 50, and then extracted by low-pass filter65Z. Thus, the magnitude ω_(z) of angular velocity 57 around the Z axisis output from output terminal 66Z.

The angular velocity around the Y axis is calculated as follows. Theoutput lines of I-V conversion amplifiers 62A and 62C are connectedtogether, whereas the output lines of I-V conversion amplifiers 62B and62D are connected together. These signals connected together are eachsent to difference amplifier 63Y. Difference amplifier 63Y outputs asignal, which is in turn detected by detector circuit 64Y using thesignal from driving circuit 50, and then extracted by low-pass filter65Y. Thus, the magnitude ω_(y) of angular velocity 59 around the Y axisis output from output terminal 66Y.

As known from FIGS. 7 and 8, the drive signals are cancelled byconnecting of electrode pads 491 through 498 before being sent to I-Vconversion amplifiers 62A to 62D. Thus, the drive signals can becancelled before being amplified by I-V conversion amplifiers 62A to62D.

The angular velocity around the Y axis is cancelled by connecting of I-Vconversion amplifiers 62A through 62D before being sent to differenceamplifier 63Z for detecting the angular velocity around the Z axis.Thus, the angular velocity around the Y axis can be cancelled beforebeing amplified by difference amplifier 63Z.

The angular velocity components around the Z axis are cancelled byconnecting of I-V conversion amplifiers 62A through 62D before beingsent to difference amplifier 63Y for detecting the angular velocityaround the Y axis.

The acceleration in the direction of the X axis can be cancelled beforebeing sent to I-V conversion amplifiers 62A to 62D, while theacceleration in the direction of the Y axis can be canceled before beingamplified by difference amplifier 63Z.

As described above, detectors 41 to 48 are disposed symmetrically withrespect to axis “C” parallel to the Y axis, and also with respect toaxis “D” parallel to the X axis. This arrangement can cancel the drivesignals, angular velocity components around the other axes, andacceleration components in the directions of the other axes, which areunwanted signals.

As shown in FIG. 9, an angular velocity detection device may furtherinclude drivers 67 to 74 on arms 21 to 24. FIG. 9 is a top view ofangular velocity detection device 16A as another example of theembodiment. In device 16A, arms 21 to 24 can also vibrate in the Y axisdirection, allowing the detection of the angular velocity around the Xaxis. The magnitude ω_(x) of the angular velocity around the X axis canbe calculated by Mathematical Formula (3)

ω_(x)=(S1+S2+S3+S4)−(S5+S6+S7+S8)  (3)

Thus, the provision of drivers 67 to 74 allows the detection of theangular velocities around the three axes at the same time. Furthermore,drive signals, angular velocities around the other axes, andaccelerations in the directions of the other axes, which are unwantedsignals, can be cancelled with each other during the detection of theangular velocity around each axis.

In angular velocity detection devices 16 and 16A according to theembodiment, arms 21 to 24 having weights 25 to 28 are supported bycentral beam portion 20B, which is in turn supported by inner beamportion 20A Inner beam portion 20A is supported by outer beam portions18A and 18B via joints 19A and 19B. This configuration enables device16A to detect the angular velocities around the three axes at the sametime, but has the disadvantage of being susceptible to acceleration andimpact. For this reason, the effect of cancelling angular velocitiesaround the other axis and accelerations in the directions of the otheraxes is particularly evident in the device structure of device 16A.Furthermore, the influence of the external stress can be reduced bysuspending the sensing part inside the outer frame, with first slits 80Aand 80B therebetween.

As shown in FIGS. 1A and 9, fixed portions 17A and 17B are disposed asan opposing pair with outer beam portions 18A and 18B therebetween.Outer beam portions 18A and 18B are disposed as an opposing pair withfixed portions 17A and 17B therebetween. In this configuration, joints19A and 19B are preferably formed in two positions where outer beamportions 18A, 18B and inner beam portion 20A are parallel to each other.In this case, the sensing part can be suspended in the outer frameregardless of the direction in which device 16 is disposed.

Under the condition that outer beam portions 18A and 18B are subjectedto no stress in the direction parallel thereto, joints 19A and 19B maybe formed in two positions where fixed portions 17A, 17B and inner beamportion 20A are parallel to each other.

Another angular velocity detection device of the embodiment is nowdescribed as follows. FIG. 10 is a top view of angular velocitydetection device 16B as another example of the embodiment. The followingdescription will be focused on the difference between devices 16 and 16Ashown in FIGS. 1A and 9 and device 16B.

Device 16B includes detectors 76 and 78 on the side of inner beamportion 20A that faces fixed portion 17A via first slit 80B. Detector 76is near arm 21, and detector 78 is near arm 23. Device 16B furtherinclude detectors 77 and 79 on the side of inner beam portion 20A thatfaces fixed portion 17B via first slit 80A. Detector 77 is near arm 22and detector 79 is near arm 24. Detectors 76 and 78 are disposedsymmetrical to detectors 77 and 79 with respect to axis “C”, whiledetectors 76 and 77 are disposed symmetrical to detectors 78 and 79 withrespect to axis “D”. Device 16B is otherwise identical to device 16Ashown in FIG. 9. Detectors 76 to 79 function to detect the angularvelocity around the X axis applied to device 16B.

In FIG. 11, the signals to be output from detectors 76 to 79 arereferred to as S9 to S12, respectively. FIG. 11 specifically shows thefollowing: the phases of the drive signals of the detectors; the phasesin the case where angular velocities are applied around the X, Y, and Zaxes; and the phases in the case where accelerations are applied in theX, Y, and Z axes directions, with respect to the phases of the drivesignals provided by driving circuit 50.

From FIG. 11, the magnitude ω_(x2) of the angular velocity around the Xaxis can be calculated by Mathematical Formula (4)

ω_(x2)=(S9+S11)−(S10+S12).  (4)

When the phases in the cases that each one of the drive signals, angularvelocities around the Y and Z axes, and accelerations in the X, Y, and Zaxes is applied are substituted into Mathematical Formula (4), theresults become 0. Thus, angular velocities around the other axes andaccelerations in the directions of the other axes, which are unwantedsignals, are cancelled with each other by the calculation ofMathematical Formula (4).

As known from FIG. 11, in the case where detectors 76 to 79 are disposedon inner beam portion 20A in such a manner as to be symmetrical withrespect to axes “C” and “D”, no drive signals appear on detectors 76 to79. Thus, the influence of drive signals can be eliminated by unwantedsignals, without adding the signals from the plurality of detectors.

In the configuration shown in FIGS. 1A and 9, if detectors 41 to 48 aredisplaced with respect to the outer frame, drive signals cannot becancelled by performing the calculation of Mathematical Formula (1),(2), or (3). In device 16B, on the other hand, even if detectors 76 to79 are displaced with respect to the outer frame, the influence of thedrive signal components can be eliminated. Similarly, angular velocitiesaround the Y and Z axes, and acceleration in the Y axis direction, whichare unwanted signals, do not appear on detectors 41 to 48, therebyproviding the same effect.

As described above, detectors 76 to 79 can be disposed symmetricallywith respect to axes “C” and “D” to eliminate or cancel drive signals,angular velocity components around the other axes, and accelerationcomponents in the directions of the other axes, which are unwantedsignals.

Thus, angular velocity detection device 16B extends in the X-Y planedefined by the X and Y axes where X, Y, and Z axes are orthogonal toeach other. It is preferable that detectors 41 to 48 disposed on arms 21to 24 are used as angular velocity detectors around the Z axis, and thatdetectors 76 to 79 for detecting the angular velocity around the X axisare disposed on the sides of inner beam portion 20A. The sides of innerbeam portion 20A are parallel to fixed portions 17A and 17B.

Another angular velocity detection device of the embodiment is nowdescribed as follows. FIG. 12 is a top view of angular velocitydetection device 16C according to the present embodiment. The followingdescription will be focused on the difference between device 16C anddevices 16, 16A shown in FIGS. 1A and 9.

Angular velocity detection device 16C includes detectors 81 to 84 incentral beam portion 20B. Detector 81 is near arm 21, detector 82 isnear arm 22, detector 83 is near arm 23, and detector 84 is near arm 24.Device 16C is otherwise identical to device 16A shown in FIG. 9.Detectors 81 and 83 are disposed symmetrical to detectors 82 and 84 withrespect to axis “C”, while detectors 81 and 82 are disposed symmetricalto detectors 83 and 84 with respect to axis “D”. Detectors 81 to 84function to detect the angular velocity around the Y axis applied todevice 16C.

In FIG. 13, the signals to be output from detectors 81 to 84 arereferred to as signals S13 to S16, respectively. FIG. 13 specificallyshows the following: the phases of the drive signals of the detectors;the phases in the case where angular velocities are applied around theX, Y, and Z axes; and the phases in the case where accelerations areapplied in the X, Y, and Z axes directions, with respect to the phasesof the drive signals provided by driving circuit 50.

From FIG. 13, the magnitude ω_(y2) of the angular velocity around the Yaxis can be calculated by Mathematical Formula (5)

ω_(y2)=(S13+S15)−(S14+S16)  (5)

When the phases in the cases that each one of the drive signals, angularvelocities around the X and Z axes, and accelerations in the directionsof the X, Y, and Z axes is applied are substituted into MathematicalFormula (5), the results become 0. Thus, angular velocities around theother axes and accelerations in the directions of the other axes, whichare unwanted signals, are cancelled with each other by the calculationof Mathematical Formula (5).

As known from FIG. 13, in the case where detectors 81 to 84 are disposedon central beam portion 20B in such a manner as to be symmetrical withrespect to axes “C” and “D”, no drive signals appear on detectors 81 to84. Thus, the influence of drive signals can be eliminated by unwantedsignals, without adding the signals from the plurality of detections. Inthe configuration shown in FIGS. 1A and 9, if detectors 41 to 48 aredisplaced with respect to the outer frame, drive signals cannot becancelled by performing the calculation of Mathematical Formula (1),(2), or (3). In device 16C, on the other hand, even if detectors 81 to84 are displaced with respect to the outer frame, the influence of thedrive signal components can be eliminated. Similarly, angular velocitiesaround the X and Z axes, and acceleration in the direction of the Xaxis, which are unwanted signals, do not appear on detectors 81 to 84,thereby providing the same effect.

As described above, detectors 81 to 84 can be disposed symmetricallywith respect to axes “C” and “D” to eliminate or cancel drive signals,angular velocity components around the other axes, and accelerationcomponents in the directions of the other axes, which are unwantedsignals.

Another angular velocity detection device of the embodiment is nowdescribed as follows. FIG. 14 is a partial top view of angular velocitydetection device 16G of the embodiment. The following description willbe focused on the difference between device 16G and devices 16, 16Ashown in FIGS. 1A and 9.

Angular velocity detection device 16G differs from angular velocitydetection device 16 shown in FIG. 1A in the shape of arms and thearrangement of drivers and detectors. FIG. 14 shows the shape of firstarm (hereinafter, arm) 211 as an example. Although not shown, second,third, and fourth arms, which respectively correspond to arms 22, 23,and 24 shown in FIG. 1A, have the same shape as arm 211. These arms havethe same symmetrical relationship as in angular velocity detectiondevice 16.

Arm 211 includes first end 211A, first corner 211B, and second corner211C. First end 211A is connected to central beam portion 20B. In short,arm 211 has first arm portion 211E, second arm portion 211F, and thirdarm portion 211G, which together form the shape of the letter “J”. Firstarm portion 211E extends between first end 211A and first corner 211B.Second arm portion 211F extends between first corner 211B and secondcorner 211C. Third arm portion 211G extends between second corner 211Cand second end 211D. Second end 211D is connected to weight 25. Weight25 is connected to arm 211 in such a manner that an extension of theouter side of third arm portion 211G is coincident with one side ofweight 25 having a substantially square shape.

Arm 211 and weight 25 can perform drive oscillation in the X-Y plane,and can bend in the Z axis direction. Arm 211 and weight 25 are made ofthe same material as those shown in FIG. 1A.

Drivers 29 and 30 are disposed on first arm portion 211E. Detectors 41and 42 are disposed on second arm portion 211F. Detectors 41, 42 anddrivers 29, 30 have the same configuration as those shown in FIG. 1A.Arm 211 can perform drive oscillation in the X-Y plane by applyinganti-phase voltages to drivers 29 and 30, respectively.

The principle of this angular velocity detection device is nowdescribed. When an external driving circuit (not shown) applies an ACvoltage having a resonance frequency of drive oscillation to drivers 29and 30, arm 211 and weight 25 perform drive oscillation along a driveoscillation direction D1 in the X-Y plane. If an angular velocity isapplied around the Z axis at this moment, Coriolis force is generated inthe direction at right angles with the drive oscillation direction D1.The Coriolis force excites detection oscillation in a detectionoscillation direction D2 in synchronization with the drive oscillation.Detectors 41 and 42 detect the distortion of arm 211 caused by thedetection oscillation as a displacement of arm 211, thereby detectingthe angular velocity.

In general, the resonance frequency of detection oscillation in thedetection oscillation direction D2 is set close to the resonancefrequency of drive oscillation in the drive oscillation direction D1.The reason for this is as follows. The detection oscillation generatedwhen an angular velocity is applied is in synchronization with driveoscillation. As a result, as the resonance frequency of detectionoscillation is closer to a resonance frequency of drive oscillation, thedetection oscillation is excited more.

However, since the drive oscillation direction D1 and the detectionoscillation direction D2 are different from each other, it is difficultto make the resonance frequency of drive oscillation and that ofdetection oscillation close to each other. For example, when theresonance frequency of drive oscillation in angular velocity detectiondevice 16 shown in FIG. 1A is designed to be about 40 kHz, the resonancefrequency of detection oscillation is about 65 kHz. This means thatthese resonance frequencies are 25 kHz apart from each other, decreasingthe sensitivity of the angular velocity around the Z axis.

In contrast, in the configuration shown in FIG. 14, the length W1 of arm211 in the X axis direction is set larger than the length W2 of weight25 in the X axis direction. As a result, when an angular velocity isapplied around the Z axis during the detecting resonance oscillation,the stiffness can be lower at second corner 211C and its vicinity wherestress tends to be concentrated, allowing the resonance frequency of thedetecting resonance oscillation to be lower. In an angular velocitydetection device with this configuration, when the resonance frequencyof drive oscillation is 40 kHz, the resonance frequency of detectionoscillation can be about 45 kHz. Thus, the difference between theseresonance frequencies can be 5 kHz or less, thereby allowing the angularvelocity around the Z axis to be detected at about five times as highsensitivity as angular velocity detection device 16.

As shown in FIG. 14, width 211K of second arm portion 211F may besmaller than width 211H of first arm portion 211E. With thisconfiguration, the stiffness can be low at second corner 211C and itsvicinity, allowing the resonance frequencies of drive oscillation anddetection oscillation to be close to each other. Width 211J of third armportion 211G may be smaller than width 211K of second arm portion 211F.Alternatively, first corner 211B may have a radius of curvature largerthan that of second corner 211C. With these configurations, theresonance frequencies of drive oscillation and detection oscillation canbe close to each other for the same reason. These configurations areeffective alone, but the resonance frequencies of drive oscillation anddetection oscillation can be much closer when used in combination. Thiscan further increase the sensitivity of the angular velocity around theZ axis.

When arm 211 and weight 25 are made to perform drive oscillation in thedrive oscillation direction D1, the distortion tends to be concentratedin first arm portion 211E. Therefore, the provision of drivers 29 and 30in first arm portion 211E can improve drive efficiency.

Similarly, when arm 211 and weight 25 are made to perform detectionoscillation in the detection oscillation direction D2, the distortiontends to be concentrated in second arm portion 211F. Therefore, theprovision of detectors 41 and 42 in second arm portion 211F can improvedetection efficiency. Arm 211 performs drive oscillation along the driveoscillation direction D1, and performs detection oscillation along thedetection oscillation direction D2. Hence, detectors 41 and 42 may bedisposed on third arm portion 211G to detect the detection oscillation.

As described above, the resonance frequency of the drive oscillation andthat of the detection oscillation of an angular velocity around the Zaxis can be close to each other in the angular velocity detectiondevice. As a result, the angular velocity around the Z axis can bedetected at a high sensitivity.

Another angular velocity detection device of the embodiment is nowdescribed. FIG. 15 is a top view of angular velocity detection device16D according to the embodiment. The following description will befocused on the difference between device 16D and device 16G shown inFIG. 14.

Angular velocity detection device 16D includes detectors 91 to 94 fordetecting an angular velocity around the Y axis on the sides of innerbeam portion 20A. The sides are parallel to outer beam portions 18A and18B. Device 16D is otherwise identical to device 16G.

Thus, detectors 91 to 94 can be disposed on the sides of inner beamportion 20A that are parallel to outer beam portions 18A and 18B to makecentral beam portion 20B thin, allowing unwanted resonance frequenciesin the X-Y plane to be low. This can increase the difference between theunwanted resonance frequencies and the resonance frequency of driveoscillation, allowing accurate detection of detection oscillation basedon drive oscillation.

This configuration can also be applied to angular velocity detectiondevices 16, 16A, 16B, and 16C shown in FIGS. 1A, 9, 10, and 12,respectively. In short, detectors 81 to 84 shown in FIG. 12 can bereplaced by detectors 91 to 94.

Thus, when X, Y, and Z axes are orthogonal to each other, angularvelocity detection device 16D extends in the X-Y plane defined by the Xand Y axes. It is preferable that detectors 41 to 48 disposed on arms211 to 214 are used as angular velocity detectors around the Z axis, andthat detectors 91 to 94 for detecting the angular velocity around the Xaxis are disposed on the sides of inner beam portion 20A that areparallel to outer beam portions 18A and 18B.

Detectors 76 to 79 for detecting the angular velocity around the X axisare disposed on the sides of inner beam portion 20A. is the sides areparallel to fixed portions 17A and 17B. This configuration has an effectsimilar to the configuration shown in FIG. 9.

Other angular velocity detection devices of the embodiment are nowdescribed as follows. FIGS. 16A and 16B are top views of angularvelocity detection devices 16E and 16F, respectively, of the embodiment.The following description will be focused on the difference betweendevices 16E, 16F and device 16D shown in FIG. 15.

In angular velocity detection device 16E shown in FIG. 16A, inner beamportion 20A has second slits 96A to 96D adjacent to detectors 91 to 94disposed on the sides of inner beam portion 20A that are parallel toouter beam portions 18A and 18B.

In order to improve the sensitivity of detectors 91 to 94, detectors 91to 94 need to have a larger area. However, an increase in the width ofinner beam portion 20A for the purpose of increasing the area ofdetectors 91 to 94 would result in an increase in the stiffness of innerbeam portion 20A. This would then cause the unwanted resonancefrequencies of arms 211 to 214 to get closer to the drive frequency,thereby inducing an unstable vibrational state and decreasingmeasurement accuracy.

To avoid this situation, the configuration shown in FIG. 16A includessecond slits 96A to 96D. This can decrease the stiffness of inner beamportion 20A, while increasing the area of detectors 91 to 94 relative tothe area of the top surface of inner beam portion 20A. As a result, thedifference between the drive frequency of arms 211 to 214 and theunwanted resonance frequencies can be increased while improving thesensitivity of detectors 91 to 94.

Inner beam portion 20A is stiffer near the corners than near the centerof each side. For this reason, in order to increase the differencebetween the drive frequency of arms 211 to 214 and the unwantedresonance frequencies, it is preferable to form second slits 96A to 96Dnear the corners of inner beam portion 20A.

It is further preferable that second slits 96A to 96D are righttrapezoids when viewed from the above, each having an upper base, alower base longer than the upper base, and an oblique side connectingthe upper and lower bases and that the lower base is on the outer sidein the direction of the width of inner beam portion 20A, and the obliqueside is near a corner of inner beam portion 20A. Second slits 96A to 96Dhaving such a shape facilitate the adjustment of the stiffness of innerbeam portion 20A and the sensitivity of detectors 91 to 94.

In angular velocity detection device 16F shown in FIG. 16B, on the otherhand, inner beam portion 20A has second slits 98A to 98D adjacent todetectors 76 to 79 disposed on the sides of inner beam portion 20A. Thesides are parallel to fixed portions 17A and 17B.

Similar to the case shown in FIG. 16A, in order to improve thesensitivity of detectors 76 to 79, detectors 76 to 79 need to have alarger area. However, an increase in the width of inner beam portion 20Afor the purpose of increasing the area of detectors 76 to 79 wouldresult in an increase in the stiffness of inner beam portion 20A. Thiswould then cause the unwanted resonance frequencies of arms 211 to 214to get closer to the drive frequency, thereby inducing an unstablevibrational state and decreasing measurement accuracy.

More specifically, the difference between the drive frequency of arms211 to 214 and the unwanted resonance frequencies is 500 Hz or above,and more preferably, 1000 Hz or above. Device 16F needs to be reduced insize with decreasing size of the apparatuses on which device 16F ismounted. However, as device 16F is smaller, its mass is smaller, causingthe unwanted resonance frequencies to increase and get closer to thedrive frequency.

To avoid this situation, the configuration shown in FIG. 16B is providedwith second slits 98A to 98D. This can decrease the stiffness of innerbeam portion 20A, while increasing the area of detectors 76 to 79relative to the area of the top surface of inner beam portion 20A. As aresult, the difference between the drive frequency of arms 211 to 214and the unwanted resonance frequencies can be increased while improvingthe sensitivity of detectors 76 to 79.

Specifically, in the case where angular velocity detection device 16Fhas a size of about 2.5×2.5 mm, its base is made of 150 μm thick Si, andits drive frequency is about 40 kHz, the frequency difference is about1000 Hz. This effect is provided independently of the effect of thepresence of first slits 80A and 80B.

Inner beam portion 20A is stiffer near the corners than near the centerof each side. For this reason, in order to increase the differencebetween the drive frequency of arms 211 to 214 and the unwantedresonance frequencies, it is preferable to form second slits 98A to 98Dnear the corners of inner beam portion 20A. In the configuration shownin FIG. 16B, there are no joints between fixed portions 17A, 17B andinner beam portion 20A, allowing high detection sensitivity at theposition of inner beam portion 20A near central beam portion 20B. Thus,detectors 76 to 79 can detect the angular velocity around the X axis ata high sensitivity by the arrangement of detectors 76 to 79 in thevicinity of the regions of inner beam portion 20A where inner beamportion 20A is connected to central beam portion 20B. Second slits 98Ato 98D can be formed near the corners of inner beam portion 20A wherelittle contribution is made to improve the sensitivity.

It is more preferable that second slits 98A to 98D are right trapezoidswhen viewed from the above, each having an upper base, a lower baselonger than the upper base, and an oblique side connecting the upper andlower bases and that the lower base is on the outer side in thedirection of the width of inner beam portion 20A, and the oblique sideis near a corner of inner beam portion 20A. Second slits 98A to 98Dhaving such a shape facilitate the adjustment of the stiffness of innerbeam portion 20A and the sensitivity of detectors 76 to 79. When needed,both second slits 96A to 96D shown in FIG. 16A and second slits 98A to98D shown in FIG. 16B may be formed.

The configuration shown in FIGS. 16A and 16B can also be applied toangular velocity detection devices 16, 16A, 16B, and 16C shown in FIGS.1A, 9, 10, and 12, respectively. In short, detectors 81 to 84 shown inFIG. 12 can be replaced by detectors 91 to 94, and in addition, secondslits 96A to 96D can be formed. Furthermore, in the configuration shownin FIG. 10, detectors 76 to 79 may be disposed close to central beamportion 20B, and in addition, second slits 98A to 98D may be formed.

In the above description, the angular velocity sensor includes drivingcircuit 50, detecting circuit 61, and one of angular velocity detectiondevices 16 to 16F. However, driving circuit 50 and detecting circuit 61do not have to be incorporated into the angular velocity sensor. Atleast either driving circuit 50 or detecting circuit 61 can beincorporated into an apparatus where the angular velocity sensor isinstalled.

As described above, the angular velocity sensors of the embodiments areuseful for mobile terminals and vehicles because it can cancel unwantedsignals due, for example, to acceleration, thereby having high detectionaccuracy of the angular velocity.

1. An angular velocity detection device comprising: a first fixedportion, a second fixed portion, a first beam portion connected to thefirst fixed portion, a second beam portion connected to the second fixedportion, a sensing part connected to the first beam portion and thesecond beam portion, a detector portion disposed in the sensing portion,a first slit disposed between the sensing part and the first fixedportion, a second slit disposed between the sensing part and the secondfixed portion, wherein, the sensing part comprises: a third beam portionconnected to the first beam portion, a fourth beam portion connected tothe second beam portion and extending along a same direction which thethird beam portion extends along, a fifth beam portion connected to thethird beam portion and the fourth beam portion and extending along adirection orthogonal to a direction which the third beam portion extendsalong, a sixth beam portion connected to the third beam portion andfourth beam portion and extending along a direction orthogonal to thedirection which the third beam portion extends along and parallel to thefifth beam portion, a central beam portion connected to the fifth beamportion and the sixth beam portion, a seventh beam portion, an eighthbeam portion, a ninth beam portion, and a tenth beam portion eachconnected to the central beam portion, and a first mass portion, asecond mass portion, a third mass portion, and a fourth mass portionconnected to a respective one of the seventh beam portion, the eighthbeam portion, the ninth beam portion, and the tenth beam portion,wherein the detector portion comprises: a first angular velocitydetector portion that detects an angular velocity around a first axis,and a second angular velocity detector portion that detects an angularvelocity around a second axis orthogonal to the first axis.
 2. Theangular velocity detection device according to claim 1, wherein thedetector portion comprises: a third angular velocity detector portionthat detects an angular velocity around a third axis, orthogonal to thefirst axis and the second axis.
 3. The angular velocity detection deviceaccording to claim 1, wherein: X, Y, and Z axes are orthogonal to eachother, the first beam portion extends along the X-axis, and the secondbeam portion extends along the X-axis.
 4. The angular velocity detectiondevice according to claim 1, wherein: the sixth beam portion extendsalong a direction orthogonal to a direction which the fourth beamportions extend along.
 5. The angular velocity detection deviceaccording to claim 1, further comprising: a third fixed portion, and afourth fixed portion, wherein the third fixed portion is connected tothe first fixed portion via the first beam portion, and the fourth fixedportion is connected to the second fixed portion via the first beamportion.
 6. The angular velocity detection device according to claim 1,wherein: a first imaginary line is parallel to the first beam portionand crosses a center of the angular velocity detection device in a planeview, a second imaginary line crosses an inside edge of the first beamportion which is closest to the first imaginary line in the plane view,a third imaginary line crosses an inside edge of the second beam portionwhich is closest to the first imaginary line in the plane view, a centerof the first fixed portion and a center of the third fixed portion areboth located between the first imaginary line and the second imaginaryline in the plane view, and a center of the second fixed portion and acenter of the fourth fixed portion are both located between the firstimaginary line and the second imaginary line in the plane view.
 7. Theangular velocity detection device according to claim 1, wherein: each ofthe seventh beam portion, the eighth beam portion, the ninth beamportion, and the tenth beam portion has a first portion, a secondportion, and third portion, and wherein: the first portion is parallelto the third portion, the second portion is orthogonally connected tothe first portion, and the third portion is orthogonally connected tothe second portion.
 8. An angular velocity detection sensor comprisingthe angular velocity detection device according to claim 1.